Making precision nanotube and nanowire fabrication a reality

Surrey NanoSystems produces highly advanced systems for Carbon Nanotube growth at High and Low (350 deg C and below!) temperatures - Our highly modular, systems expand the uses of CNTs making their integration possible for the next generation of silicon chips, removing roadblocks to their continuing development.

We make precision, repeatable, PECVD and CVD carbon nanotube and Nanowire fabrication a reality. Our designed-for-purpose tools bridge the gap between R&D initiatives, and the volume production of commercial nanotechnology-based products.

We supply systems for advanced Solar cell and Fuel cell applications; and we have the capability to configure, and build the turnkey process equipment you need to support your nanoengineering and thin film programs.

The NanoGrowth® platform, contains world-leading intellectual property developed over many years at The University of Surrey's Advanced Technology Institute (ATI), This systems provides a versatile and proven platform for nanoengineering research, development and production.

The NanoGrowth Catalyst® tool is unique in combining the ability to deposit metallic CNT growth catalysts in the form of sputtered films, or Nano particle/cluster films in a controlled vacuum environment, and internally transfer the processed substrate to the nanotube growth chamber for CNT formation, with no break in vacuum. This enhances the ability to growth high quality growth tubes and enhances the repeatability of results obtained.

The NanoGrowth platform provides:

• Highly-programmable CVD, PECVD and ICP CNT processing for MWCNT and SWCNT
• Proven material growth recipes including unique lower-temperature processes to 350 Deg C and below for multi wall carbon nanotubes (MWCNT)
• Modular and scalable hardware, from a benchtop furnace, to a load lock system with built-in Ferrocene and Sputter, or nano particle catalyst sources and Remote ICP plasma generation
• Common software control throughout the range of systems and technology platforms
  
  

We will configure and build the turnkey process equipment you need to support your nano engineering and thin film research and production programs.

Surrey NanoSystems' products and services

• Systems for carbon nanotube growth and Nanowire fabrication
• UHV and HV Sputtering systems for Semiconductor, MEMS, GMR fabrication, Solar Cell and Fuel Cell applications
• RF and DC Sputter Magnetron power switches and accessories