Surrey NanoSystems' unique PlasmaSwitch™ RF and DC power distribution switch boxes can dramatically increase the flexibility of tools, to enable co-sputtering, without the need for costly additional power supplies and networks. 

They can dramatically reduce the bill of materials (and equipment space) usually required for engineers building or upgrading sputter coating or plasma deposition systems and reactors, while substantially increasing the productivity of equipment.

Surrey NanoSystems produces PlasmaSwitch boxes in a number of standard configurations to suit common tools with 2 or 4 magnetrons:

• RF only switching
• DC only switching
• combined RF/DC switching

Surrey NanoSystems is also happy to produce variants of the switch on request (for example we have manufactured switches for 6 and 8 magnetrons).

PlasmaSwitch boxes are designed to be used after the 'auto matching network' or AMN. The boxes can also be used with multiple matching networks and a single RF generator.

The boxes are field proven and have been tested with numerous manufacturers' power supplies including:

• Advanced Converters DC
• Advanced Energy (DC and RF)
• Comdel RF
• Dressler RF
• Glassman DC
• Huttinger (DC and RF)

We also provide a turnkey installation service: contact Surrey NanoSystems.