RF & DC Plasma Power Distribution
PlasmaSwitch™
Surrey NanoSystems' unique PlasmaSwitch™ RF and DC power distribution switch boxes can dramatically increase the flexibility of tools, to enable co-sputtering, without the need for costly additional power supplies and networks.
They can dramatically reduce the bill of materials (and equipment space) usually required for engineers building or upgrading sputter coating or plasma deposition systems and reactors, while substantially increasing the productivity of equipment.
Surrey NanoSystems produces PlasmaSwitch boxes in a number of standard configurations to suit common tools with 2 or 4 magnetrons:
- RF only switching
- DC only switching
- combined RF/DC switching
Surrey NanoSystems is also happy to produce variants of the switch on request (for example we have manufactured switches for 6 and 8 magnetrons).
PlasmaSwitch boxes are designed to be used after the 'auto matching network' or AMN. The boxes can also be used with multiple matching networks and a single RF generator.
The boxes are field proven and have been tested with numerous manufacturers' power supplies including:
- Advanced Converters DC
- Advanced Energy (DC and RF)
- Comdel RF
- Dressler RF
- Glassman DC
- Huttinger (DC and RF)
We also provide a turnkey installation service: contact Surrey NanoSystems.
RF & DC Power distribution
- Plasma switch datasheet
- Automatic RF & DC power distribution
- RF filtration protects DC power supplies
- EMC and CE complient
- Installed after the Automatch - big cost reduction on multi target tools
- No more manual coax cable change overs
- Tested on most leading RF and DC plasma PSU's
Find out more
To find out more, contact us on +44 (0) 1273 515899, or see our contact page.