Surrey NanoSystems' nanomaterial growth platform and options
In addition to developing enabling nanoelectronics technologies to support the continued scaling of semiconductor devices and clean-tech, Surrey NanoSystems designs and manufactures the industry leading platform for the development and growth of nanomaterials including MW/SW carbon nanotubes, nanowires, nano catalysts and graphene. Both tools employ the same highly-versatile programming and control software. Numerous options may be fitted at time of order, or during the system lifecycle:
Eight world leading nanomaterial growth technologies - in one platform...
Full-featured multi-chamber platform that keeps the substrate under vacuum throughout complete fabrication cycle, from catalyst/precursor delivery, to growth of barriers films and nano structures. Eight key nanomaterial processing capabilities come with this supremely-flexible and automated system.
- Rapid thermal growth (RTG) module including rapid Photo Thermal CVD growth (PTCVD)
- Inductively coupled plasma (ICP) source for CVD growth from liquid vapour and gas sources
- Ferrocene sublimation system